Towards scalable capacitive cantilever arrays for emerging biomedical applications
Towards scalable capacitive cantilever arrays for emerging biomedical applications
Authors
Sebastian Magierowski, Giancarlo Ayala-Charca, Bahareh Gholamzadeh, Somayeh Ghasemi, Ebrahim Ghafar-Zadeh
Venue
Sensors and Actuators A: Physical
Journal Paper
2017