A New Non-Invasive Air-Based Actuator for Characterizing and Testing MEMS Devices
A New Non-Invasive Air-Based Actuator for Characterizing and Testing MEMS Devices
Authors
Abbas Panahi, Mohammad Hossein Sabour, Ebrahim Ghafar-Zadeh, M. Hossein Sabour
Venue
Actuators
Journal Paper
2020