Biologically-inspired

Sensors and Actuators Laboratory

Abstract visualization for the publication: Design and Modeling of a New MEMS Capacitive Microcantilever Sensor for Gas Flow Monitoring

Design and Modeling of a New MEMS Capacitive Microcantilever Sensor for Gas Flow Monitoring

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Design and Modeling of a New MEMS Capacitive Microcantilever Sensor for Gas Flow Monitoring

Authors

Abbas Panahi, Pouya Ghasemi, M.H. Sabour, Sebastian Magierowski, Ebrahim Ghafar-Zadeh

Venue

IEEE Canadian Journal of Electrical and Computer Engineering

Journal Paper

2021

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Design and Modeling of a New MEMS Capacitive Microcantilever Sensor for Gas Flow Monitoring | BioSA Lab | BioSA Lab